Semiconductor Device Processing: Technology Trends in the VLSI Era
Semiconductor Device Processing: Technology Trends in the VLSI Era by R. Castellano

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Author: R. Castellano
Title: Semiconductor Device Processing: Technology Trends in the VLSI Era
ISBN: 2881245161
ISBN13: 978-2881245169
Other Formats: lit lrf azw docx
Pages: 234 pages
Publisher: Routledge (January 1, 1992)
Language: English
Size PDF version: 1389 kb
Size EPUB version: 1509 kb
Category: Engineering & Transportation
Subcategory: Engineering

This book examines and projects the critical technologies involved in the fabrication of very large scale integration (VLSI) semiconductor devices, including their likely developments, why and when their introduction or demise will take place, what problems and choices are facing the industry, and where the opportunities and pitfalls may exist. Written from an industry perspective, this book emphasizes the most rapid technological advances in the semiconductor industry, and addresses the strategic issues impacting both the user and the supplier of chemicals, materials and equipment. The book assists the reader in evaluating the spectrum of products and systems available for use at every crucial stage in the processing of an advanced integrated circuit (IC) device. To the suppliers, the book offers insight for future user needs and will assist them in long-range planning, and new product development and improvement. Topics discussed in detail include contamination control; thin film deposition and et

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